Model | Type | Input | Output |

Spray | CFD model | (Substrate temperature) (Initial droplet velocity) | P (Pressure) T (Temperature) (Initial droplet mass) (Initial droplet diameter) |

Evaporation | Math model | P (Pressure) T (Temperature) (Initial droplet mass) (Initial droplet diameter) | (Final droplet mass) |

Decomposition/ Reaction | Math model | T (Temperature) C (Initial concentration of precursor) derived from | (Final fraction of precursor reacted) (Final droplet diameter) |

Deposition/ Growth | Math model | (Initial film thickness) derived from | (Final film thickness) |