Model

Type

Input

Output

Spray

CFD model

(Substrate temperature)

(Initial droplet velocity)

P (Pressure)

T (Temperature)

(Initial droplet mass)

(Initial droplet diameter)

Evaporation

Math model

P (Pressure)

T (Temperature)

(Initial droplet mass)

(Initial droplet diameter)

(Final droplet mass)

Decomposition/ Reaction

Math model

T (Temperature)

C (Initial concentration of precursor) derived from

(Final fraction of precursor reacted)

(Final droplet diameter)

Deposition/

Growth

Math model

(Initial film thickness) derived from

(Final film thickness)