Parameter | Description |
Aspect Ratio | Height: Width of feature - Physical Geometry |
Sherwood Number | Mass transfer from bulk to trench |
Diffusion Number | Ratio of Diffusion time period to time pulse time period |
Duty Factor | Ratio of deposition time to pulse time |
Dimensionless concentration | Normalized Species concentration in reactor space |
Polarization | Measure of mass transfer resistance to kinetic resistance |