Resolution

HV mode: 3.0 nm, LV mode: 4.0 nm

Magnification

×5 - ×300,000

Accelerating voltage

0.3 kV to 30 kV

Specimen stage

5-axis motor stage

X: 125 mm Y: 100 mm Z: 5 to 80 mm T: −10 to 90˚ R: 360˚

Maximum sample diameter

200 mm φ

Options

EDS, WDS, EBSD, etc.