| Resolution | HV mode: 3.0 nm, LV mode: 4.0 nm |
| Magnification | ×5 - ×300,000 |
| Accelerating voltage | 0.3 kV to 30 kV |
| Specimen stage | 5-axis motor stage X: 125 mm Y: 100 mm Z: 5 to 80 mm T: −10 to 90˚ R: 360˚ |
| Maximum sample diameter | 200 mm φ |
| Options | EDS, WDS, EBSD, etc. |