| Sample No. | Coating composition | Substrate material | Сu-С coating | |||
| Copper lattice spacing, nm | Crystalline blocks size by components, nm | Crystalline blocks size, mean value, nm | RMS microdeformation, % | |||
| 9 | Pure copper | Copper | 0.36150 | - | - | - |
| Ch. steel* | 0.36143 | >150/37 | 80 | 0.046 | ||
| 5 | 14 | Ch. steel | 0.36142 | 100/40 | 45 | 0.060 |
| Silicon** | 0.36150 | - | - | - | ||
| 4 | 17 | Ch. steel | 0.36140 | 100/30 | 37 | 0.120 |
| Silicon | 0.36150 | - | - | - | ||
| 3 | 18 | Ch. steel | 0.36156 | 56/25 | 40 | 0.135 |
| Silicon | 0.36150 | - | - | - | ||
| 27 | 35 | Ch. steel | 0.36156 | 44/15 | 22 | 0.054 |
| 13 | 72 | Ch. steel | 0.36158 | 28/15 | 23 | 0.230 |
| 16 | 86 | Ch. steel | 0.36178 | 20/9 | 19 | 0.250 |
| 18 | 93 | Ch. steel | 0.36420 | 20/9 | 10 | 0.210 |