Sample no.

Annealing

conditions

Photo-electron

peak

Binding

energy

(eV)

FWHMa

(eV)

MPEb

MFc

Modulation

retention, %

Ox/Redd

PKH/0

Initial

sample

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

161.0

162.2

163.6

164.8

166.8

168.0

168.9

170.1

3.0

3.0

3.0

3.0

3.0

3.0

3.0

3.0

0.05

0.10

0.44

0.41

-

5.7

PKH/

600_16

600˚C,

16 h

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

162.8

164.0

166.9

168.1

168.9

170.0

1.9

1.9

2.8

2.8

1.7

1.7

0.07

0.75

0.19

93

13.4

PKH/

600_30

600oC,

30 h

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

163.0

164.2

166.5

167.7

168.5

169.7

2.9

2.9

3.0

3.0

3.0

3.0

0.17

0.43

0.40

73

4.9

PKH/

650_1

650˚C,

1 h

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

161.0

162.2

163.6

164.8

166.6

167.8

168.5

169.7

1.3

1.3

3.0

3.0

3.0

3.0

2.2

2.2

0.05

0.13

0.51

0.31

65

4.6

PKH/

650_24

650˚C,

24 h

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

161.5

162.7

163.6

164.8

166.8

168.0

169.2

170.4

1.1

1.1

2.9

2.9

3.0

3.0

2.8

2.8

0.02

0.11

0.43

0.44

15

6.7

PKH/

800_0.3

800˚C,

0.3 h

2p3/2

2p1/2

2p3/2

2p1/2

2p3/2

2p1/2

163.6

164.8

167.1

168.3

169.0

170.2

3.0

3.0

2.8

2.8

2.0

2.0

0.11

0.61

0.27

0

8.0