| Properties | Thermal Plasma (quasi-equilibrium plasma) | Non-thermal Plasma (Non equilibrium plasma) | ||||
| Temperature | Te ≈ Ti ≈ Tg ≤ 2 × 104 K | Te Ti ≈ Tg ≤ 300 …. 103 K | ||||
| Density | ≥1020 m−3 |
| ̴̴1010 m−3 | |||
| Classification: | Thermal arc plasma | Gliding arc discharge | Dielectric barrier discharge | Corona discharge | Glow discharge | Atmospheric pressure plasma jet |
| Excitation | DC | DC/AC | AC/RF | Pulsed DC | DC/AC | RF (13.5 MHz) |
| Pressure, bar | 0.1 - 100 | ~1 | ~1 - 3 | ~1 | <10 mbar | ~1 |
| Electron energies, eV | 1 - 10 | 1.4 - 2.1 | 1.0 - 30 | ~5 | 2.0 - 8.0 | |
| Electron density, | 1015 - 1019 | >1013 | 1012 - 1015 | 109 - 1013 | 109 - 1012 | 1011 - 1012 |
| cm−3 | ||||||
| Breakdown voltage, | 10 - 100 | 0.5 - 4.0 | 5.0 -25 | 10.0 - 50.0 | 0.05 - 0.2 | |
| kV | ||||||
| Current, A | 30 - 30,000 | 10-1-50 | 1.0 - 50 | <10 - 5 | 10-5-1 | |
| Tmac, K | 5 × 103 - 104 | 1000 - 3000 | ~300 | ~400 | ~700 | ~400 |
| Carrier gas | air, N2, O2, etc. | N2, O2, Ar | N2, O2, rare gas | N2, O2, Ar | N2, O2, Ar | He, Ar |