| Property |
| Material | |||
| GaN AlGaN/GaN | SiC | Diamond | Si | GaAs/AlGaAs, InGaAs | |
| Band gap energy, Eg (MV/cm) | 3.44 eV | 3.26 eV | 5.45 eV | 1.12 eV | 1.43 eV |
| Electric breakdown field, Ec (MV/cm) | 3 | 3 | 10 | 0.3 | 0.4 |
| Saturated (Peak) Velocity electronics, Vsat (VPeak) (×107 cm/s) | 2.5 | 2.0 | 2.7 | 1.0 | 1.0 |
| Electron mobility, μs (cm2/V∙s) | 900 | 700 | 4800 | 1500 | 8500 |
| 2DEG density, ns (×1013 cm−2) | 1.0 | N.A | N.A | N.A | <0.2 |
| Thermal conductivity (W/cm∙K) | 1.3 - 2.1 | 3.7 - 4.5 | 22 | 1.5 | 0.5 |
| Relative Permittivity εr | 9.0 | 10.1 | 5.5 | 11.8 | 1.8 |