Co-citations

Centrality

Year

Keywords

388

0.11

1991

fabrication

356

0.21

1991

growth

354

0.07

1991

films

293

0.12

1991

silicon

253

0.19

1991

thin-films

241

0.12

1990

lithography

206

0.15

1991

nanolithography

169

0

1997

chemical-vapor-deposition

166

0

2000

arrays

163

0.22

1991

deposition