Co-citations | Centrality | Year | Keywords |
388 | 0.11 | 1991 | fabrication |
356 | 0.21 | 1991 | growth |
354 | 0.07 | 1991 | films |
293 | 0.12 | 1991 | silicon |
253 | 0.19 | 1991 | thin-films |
241 | 0.12 | 1990 | lithography |
206 | 0.15 | 1991 | nanolithography |
169 | 0 | 1997 | chemical-vapor-deposition |
166 | 0 | 2000 | arrays |
163 | 0.22 | 1991 | deposition |