| Co-citations | Centrality | Year | Keywords |
| 388 | 0.11 | 1991 | fabrication |
| 356 | 0.21 | 1991 | growth |
| 354 | 0.07 | 1991 | films |
| 293 | 0.12 | 1991 | silicon |
| 253 | 0.19 | 1991 | thin-films |
| 241 | 0.12 | 1990 | lithography |
| 206 | 0.15 | 1991 | nanolithography |
| 169 | 0 | 1997 | chemical-vapor-deposition |
| 166 | 0 | 2000 | arrays |
| 163 | 0.22 | 1991 | deposition |