| Precision Test-Rig Name | Taly-surf® Inductive Gauge |
| Resolution | Up to 0.8 nm |
| Measuring Range | Over 12.5 mm |
| Horizontal Data Spacing | 0.125 µm |
| Conisphere Tip (Stylus) | 2 µm |
| normal Load | 0.7 mN |
| Traverse Speed | Down to 0.5 mm∙s−1 |
| Cut-Off | 0.8 mm |