Precision Test-Rig Name

Taly-surf® Inductive Gauge

Resolution

Up to 0.8 nm

Measuring Range

Over 12.5 mm

Horizontal Data Spacing

0.125 µm

Conisphere Tip (Stylus)

2 µm

normal Load

0.7 mN

Traverse Speed

Down to 0.5 mm∙s−1

Cut-Off

0.8 mm