Symbol | Physical parameters | Value |
CQ
Jgas
m (total) S
| heat capacity matrix coefficient matrix of heat conduction gas specific heat capacity wafer specific heat capacity wafer mass heat transfer area norm bounded uncertainties | 2.80 kw・sec・˚C 0.55 kw・m2・˚C 1.355 kJ・kg・˚C 0.84 kJ・kg・˚C 405.8 g 1.54 m2 0.1 sin(t) × 10−3 kJ・s−1 |