Region

1

2

3

4

5

6

Film thickness (HCF) (nm)

575.2

576.6

570.1

576.6

575.2

568.9

Ellipsometry (nm)

~570

Film thickness (HCF) (nm)

302.8

304.8

302.5

301.7

300.8

301.6

Ellipsometry (nm)

~300