Compnents/Photoresist samples

Pt-0

Pt-1

Pt-2

Pt-3

Pt-4

Pt-5

Pt-6

Photoinitiator

Irgacure 754

1

1

1

1

1

1

1

Irgacure TPO

6

6

6

6

6

6

6

Photosensitizer

Darocur ITX

2

2

2

2

2

2

2

Binder Polymer

(30 wt% in PGMEA)

SR-6300 (SMS Co., South Korea)

35

35

35

35

35

35

35

Multifunctional Monomers

DPHA

8

8

8

8

8

8

8

Polyimides (30 wt% in PGMEA)

FTAP-1

10

MCAP-1

10

DAMP-4

10

DAMP-5

10

MT-10

10

MY-10

10

Black Millbase

(23 wt% in PGMEA)

LT-1 (SKC htm. Co., South Korea)

35

35

35

35

35

35

35

Solvent

PGMEA

5

5

5

5

5

5

5

Total

wt%

100

100

100

100

100

100

100

Thermal Stability

1 wt% loss temp. (TGA)

282

-

-

-

-

316

305