Compnents/Photoresist samples | Pt-0 | Pt-1 | Pt-2 | Pt-3 | Pt-4 | Pt-5 | Pt-6 | |
Photoinitiator | Irgacure 754 | 1 | 1 | 1 | 1 | 1 | 1 | 1 |
Irgacure TPO | 6 | 6 | 6 | 6 | 6 | 6 | 6 | |
Photosensitizer | Darocur ITX | 2 | 2 | 2 | 2 | 2 | 2 | 2 |
Binder Polymer (30 wt% in PGMEA) | SR-6300 (SMS Co., South Korea) | 35 | 35 | 35 | 35 | 35 | 35 | 35 |
Multifunctional Monomers | DPHA | 8 | 8 | 8 | 8 | 8 | 8 | 8 |
Polyimides (30 wt% in PGMEA) | FTAP-1 |
| 10 |
|
|
|
|
|
MCAP-1 |
|
| 10 |
|
|
|
| |
DAMP-4 |
|
|
| 10 |
|
|
| |
DAMP-5 |
|
|
|
| 10 |
|
| |
MT-10 |
|
|
|
|
| 10 |
| |
MY-10 |
|
|
|
|
|
| 10 | |
Black Millbase (23 wt% in PGMEA) | LT-1 (SKC htm. Co., South Korea) | 35 | 35 | 35 | 35 | 35 | 35 | 35 |
Solvent | PGMEA | 5 | 5 | 5 | 5 | 5 | 5 | 5 |
Total | wt% | 100 | 100 | 100 | 100 | 100 | 100 | 100 |
Thermal Stability | 1 wt% loss temp. (TGA) | 282 | - | - | - | - | 316 | 305 |