Power (W) | Pressure (mT) | Thickness (nm) | Ga % | N % | O % | N/Ga Ratio | Time (hours) |
50 | 4 | 99.53 | 33.7 | 11.08 | 34.07 | 0.33 | 1 |
40 | 4 | 78.1 | 6.42 | 1.15 |
| 0.18 | 1 |
40 | 5 | 72.62 | 14.6 | 4.1 |
| 0.28 | 1 |
40 | 10 | 41.2 | 11.4 | 4.62 | 20.21 | 0.40 | 1 |
40 | 10 | 43.4 | 11.9 | 5.03 | 20.41 | 0.42 | 1 |
40 | 5 | 41.19 | 25.4 | 14.41 | 26.58 | 0.56 | 2 |