Power (W)

Pressure

(mT)

Thickness (nm)

Ga %

N %

O %

N/Ga Ratio

Time (hours)

50

4

99.53

33.7

11.08

34.07

0.33

1

40

4

78.1

6.42

1.15

0.18

1

40

5

72.62

14.6

4.1

0.28

1

40

10

41.2

11.4

4.62

20.21

0.40

1

40

10

43.4

11.9

5.03

20.41

0.42

1

40

5

41.19

25.4

14.41

26.58

0.56

2