Nitrogen Gas (%)

Power (W)

Pressure

(mT)

Thickness (nm)

Atomic percentage

N/Ga Ratio

Time (hrs.)

Ga (%)

N (%)

O (%)

60

40

15

32

5.5

6.26

57.99

1.1

2

60

15

15

6

1.92

3.37

56.14

1.75

3

100

40

15

22

5.5

6.26

57.99

1.13

2

100

15

15

3

3.13

3.3

55.83

1.05

3