Nitrogen Gas (%) | Power (W) | Pressure (mT) | Thickness (nm) | Atomic percentage | N/Ga Ratio | Time (hrs.) | ||
Ga (%) | N (%) | O (%) | ||||||
60 | 40 | 15 | 32 | 5.5 | 6.26 | 57.99 | 1.1 | 2 |
60 | 15 | 15 | 6 | 1.92 | 3.37 | 56.14 | 1.75 | 3 |
100 | 40 | 15 | 22 | 5.5 | 6.26 | 57.99 | 1.13 | 2 |
100 | 15 | 15 | 3 | 3.13 | 3.3 | 55.83 | 1.05 | 3 |