Pure Argon Gas

Power (W)

Pressure (mT)

Thickness (nm)

Ga %

N %

O %

N/Ga Ratio

Time (hr.)

40

4

175

30.11

4.87

26.22

0.16

1

40

5

165

28.25

5.48

22.04

0.19

1

50

4

198

38.63

6.19

28.45

0.16

1

50

5

185

30.97

4.05

33.09

0.13

1