Operating Conditions | Conventional SEM | Environmental SEM |
Imaging Modes | Secondary Electrons (ET) Backscattered Electrons | Secondary Electrons (ESD) Backscattered Electrons |
Working Distance | 6 - 40 mm | 6 - 15 mm |
Accelerating Voltage | 1 - 30 kV, normally 20 kV | 1 - 30 kV, normally 20 kV |
Vacuum Conditions | 10−5 to 10−3 Pa High vacuum | 10−4 to 0.9 kPa. Normally 10 - 250 Pa. |
Magnification | 10 to 100.000 times | 70 to 100.000 times |
Resolution | 1.8 to 60 nm, usually 4.5 nm | 5 or 7 nm |
Sample Requirement | Dry and conductive samples only. | Any samples type |
Sample Exchange Time | 3 - 5 minutes | 30 - 60 seconds |
Approximate Cost | $65.000 - 250.000 | $179.000 - 250.000 |