Operating Conditions

Conventional SEM

Environmental SEM

Imaging Modes

Secondary Electrons (ET) Backscattered Electrons

Secondary Electrons (ESD) Backscattered Electrons

Working Distance

6 - 40 mm

6 - 15 mm

Accelerating Voltage

1 - 30 kV, normally 20 kV

1 - 30 kV, normally 20 kV

Vacuum Conditions

10−5 to 10−3 Pa High vacuum

10−4 to 0.9 kPa. Normally 10 - 250 Pa.

Magnification

10 to 100.000 times

70 to 100.000 times

Resolution

1.8 to 60 nm, usually 4.5 nm

5 or 7 nm

Sample Requirement

Dry and conductive samples only.

Any samples type

Sample Exchange Time

3 - 5 minutes

30 - 60 seconds

Approximate Cost

$65.000 - 250.000

$179.000 - 250.000