Event

Values

Pressure

1 Pa

Ar flow rate

40 sccm

CH₄ flow rate

120 sccm

N₂ flow rate

0 - 60 sccm

Temperature

≤150˚C

Arc cathode current

60A

Additional anode current

30A

Substrate bias voltage

−800 V

Duty cycle

70% (unipolar)

Frequency

50 kHz

Time (min) for 1 mm

60 - 90