Antireflection layer

Refractive index at l = 600 nm

RID (Dnt)

Average reflectance R (%)

SiNx

1.86

67

9.1

Al2O3

1.77

127

9.2

ZrO2

2.16

142

9.4

SiNx

2.2

161

10.8

SiNx

2.4

279

13.1

SiO2

1.46

344

14.3

TiO2

2.60

445

15