Experimentally Measured Ratio of Precursor Mixtures in mol.% (Zn Acetate:Al(Acac)₃)

Experimentally Calculated Zn/Al Ratio in Precursor Mixtures

RBS Elemental Concentration of Zn (at.%) in the Thin Films

RBS Elemental Concentration of O (at.%) in the Thin Films

RBS Elemental Concentration of Al (at.%) in the Thin Film

Zn/Al Ratio RBS Elemental Concentration in the Thin Films

RBS Determined

Thin Film Thickness (10¹⁵ Atoms/cm²)

100:0 (Undoped ZnO)

-

0.091136

0.908864

-

-

5230.50 (634 nm)

95:5

9.50

0.085263

0.902635

0.012102

7.05

5167.21 (612 nm)

90:10

4.50

0.073136

0.911772

0.015092

4.85

4488.07 (487 nm)

85:15

2.83

0.062243

0.918100

0.019657

3.17

4738.62 (509 nm)