| Device description | Beam diameter D [mm] | Capacitance C [pF] | Dielectric constant e |
| 1 capacitor | 3 | 270.5 | 17312 |
| 1 capacitor | 4 | 481.0 | 17316 |
| 1 capacitor | 5 | 751.5 | 17315 |
| 1 capacitor + IT | 3 | 43.4 | 2995.4 |
| 1 capacitor + IT | 4 | 77.3 | 3001.0 |
| 1 capacitor + IT | 5 | 120.6 | 2996.4 |