| Structures | Widths (nm) | Doping Concentrations (×1024 m−3) | |||||||||||
| n-side | p-side | n-side | p-side | ||||||||||
| low | high | low | low | high | low | low | high | low | low | high | low | ||
| Si (flat) | - | - | 52 | 52 | - | - | - | - | 1.4 | 1.4 | - | - | |
| SiC (flat) | - | - | 148 | 148 | - | - | - | - | 1.94 | 1.94 | - | - | |
| SiC (lo-hi-lo) | 104 | 22 | 22 | 22 | 22 | 104 | 1.6 | 5.0 | 1.6 | 1.6 | 5.0 | 1.6 | |