Symbol
Description
Values
Elastic constant for the piezoelectric material
63 Gpa [30]
Piezoelectric charge coefficient
320 × 10−12 C/N [30]
Coupling coefficient
0.43 [30]
Equation (18)
0.36 m
Damping ratio
0.0541 [28] [31]
Relative permittivity
3400 [30]
Capacitance of the piezoelectric bender
7.568 nF [28] [30]
Length of the proof mass
17 mm [28]
Height of the proof mass
7.7 mm [28]
width of the proof mass
3.6 mm [28]
Length of the beam
11 mm [28]
Length of the electrode
11 mm [28]
width of the beam
3.2 mm [28]
Thickness of the piezo layer
0.28 mm [28]
Thickness of the center shim
0.1 mm [28]
Maximum input acceleration
To measure
Resonance frequency
To measure