Parameter

Value

As2S3 thickness in Bragg reflector

130 nm

SiO2 thickness in Bragg reflector

340 nm

BCB thickness

2 μm

As2S3 thickness for grating layer

500 nm, 100 nm

Thin film X-cut LiNbO3 thickness

500 nm

Grating coupler period

850 nm

Grating coupler duty cyclea

0.94, 0.82, 0.70, 0.59

Number of periods

2, 2, 2, 16