| Parameter | Value |
| As2S3 thickness in Bragg reflector | 130 nm |
| SiO2 thickness in Bragg reflector | 340 nm |
| BCB thickness | 2 μm |
| As2S3 thickness for grating layer | 500 nm, 100 nm |
| Thin film X-cut LiNbO3 thickness | 500 nm |
| Grating coupler period | 850 nm |
| Grating coupler duty cyclea | 0.94, 0.82, 0.70, 0.59 |
| Number of periods | 2, 2, 2, 16 |