Instrument Name

TES CAN VEGA-3 LMU

Made in

Czech Republic

SEM Magnification

4.5× to 1,000,000×

SEM Resolution

3 nm at 30 kV

Maximum Field of View

0.08 µm

SEM HV (High Voltage)

5 - 30 kV

SEM WD (Working Distance)

1 - 40 mm

Electron Gun

Tungsten Heated Cathode

Scanning Speed

From 20 ns to 10 ms per pixel