| Instrument Name | TES CAN VEGA-3 LMU |
| Made in | Czech Republic |
| SEM Magnification | 4.5× to 1,000,000× |
| SEM Resolution | 3 nm at 30 kV |
| Maximum Field of View | 0.08 µm |
| SEM HV (High Voltage) | 5 - 30 kV |
| SEM WD (Working Distance) | 1 - 40 mm |
| Electron Gun | Tungsten Heated Cathode |
| Scanning Speed | From 20 ns to 10 ms per pixel |