| LF | HF |
Elements | 8 | 128 |
Elevation [mm] | 5 | 2.8 |
Pitch [µm] | 2308 | 125 |
Membrane [µm × µm] | 40 × 40 | 15 × 21 |
Gap height [nm] | 500 | 100 |
Membranes thickness [nm] | 800 |