| Step # | Time | Temp | O2 | Pressure | Remarks |
| UOM | Min | ˚C | sccm | mbar | |
| 1 | 10 | 700 | 0 | 1060 | Boat-In |
| 2 | 10 | 750 | 0 | 200 | Heat-Up + Pump Down |
| 3 | 20 | 780 and 750 | 500 | 200 | Oxidation Anneal |
| 4 | 10 | 700 | 0 | 200 | Cool-Down |
| 5 | 10 | 700 | 0 | 1060 | Boat-Out |