| Groups | Process step | Parameters | Values | Remarks |
| B1 | Deposition | N2-POCl3 flow rate | 90 + 90 sccm | Baseline |
| B2 | Drive-in | O2 flow rate | 3 slm | Baseline |
| T1 | Deposition | N2-POCl3 flow rate | 110 + 90 + 80 sccm | Trial |
| T2 | Drive-in | O2 flow rate | 1.5 slm | Trial |
| T3 | Annealing | Anneal temperature | 780˚C | Combination trial |
| T4 | Annealing | Anneal temperature | 750˚C | Combination trial |