|
| Roughness Ra, cw/Ra, pw | Partial roughness Ra, cw/Ra, pw | ||
| Fabrication Angle | λ = 1 µm - 800 µm | λ = 2.5 - 3.9 µm | λ = 31.25 - 62.5 µm | λ = 500 - 800 µm |
| 15˚ (f) | 0.467 µm 0.621 µm | 0.022 µm 0.021 µm | 0.193 µm 0.170 µm | 0.612 µm 0.616 µm |
| 75˚ (f) | 0.354 µm 0.324 µm | 0.014 µm 0.018 µm | 0.116µm 0.120 µm | 0.225 µm 0.311 µm |
| 45˚ (b) | 0.551 µm 0.485 µm | 0.022 µm 0.016 µm | 0.170 µm 0.098 µm | 0.782 µm 0.498 µm |