Photoresist code | PR-0 | PR-1 | PR-2 | |
Photo-initiator | SPI-03 (Samyang. Co. Ltd.) | 4.0 | 4.0 | 4.0 |
Photo-sensitizer | Darocure ITX (Ciba, Switz) | 1.0 | 1.0 | 1.0 |
Binder polymer (45 wt%) | CBP (KISCO, Korea) | 20 |
|
|
Binder polymer (30 wt%) | FCYF |
| 27 |
|
Binder polymer (40 wt%) | FSKF |
|
| 20 |
Multifunctional monomer | PM6a | 6.0 | 6.0 | 6.0 |
Adhesion promotor | MSMAb | 1.0 | 1.0 | 1.0 |
Solvent | PGMEA | 12 | 5.0 | 12 |
Black pigment | BK-4926 (Tokushiki, Japan) | 56 | 56 | 56 |
Total | wt% | 100 | 100 | 100 |