Photoresist code

PR-0

PR-1

PR-2

Photo-initiator

SPI-03 (Samyang. Co. Ltd.)

4.0

4.0

4.0

Photo-sensitizer

Darocure ITX (Ciba, Switz)

1.0

1.0

1.0

Binder polymer (45 wt%)

CBP (KISCO, Korea)

20

Binder polymer (30 wt%)

FCYF

27

Binder polymer (40 wt%)

FSKF

20

Multifunctional monomer

PM6^a

6.0

6.0

6.0

Adhesion promotor

MSMA^b

1.0

1.0

1.0

Solvent

PGMEA

12

5.0

12

Black pigment

BK-4926 (Tokushiki, Japan)

56

56

56

Total

wt%

100

100

100