Parameter

Unit

Value

Laser beam

(continuous wave)

wavelength

laser power

focus spot diameter

processing speed

nm

W

µm

µm/s

1070

0.6 … 1.8

25

50 … 100

Phosphoric acid

H3PO4

concentration

boiling temperature

transmission coefficient

layer height

flow speed

mol/L

˚C

-

mm

m/s

5

104

0.68

20

3