Sample | Improvement of UV resin formulation | UV oligomer | UV monomer | Photoinitiator | Total (%) | ||||||
F150 | EEEA | PETA | IBOA | HDDA | 2-HEA | 2-EHA | PI-TPO | ||||
(25wt% in 2-HEA) | (25wt% in EEEA) | ||||||||||
UVX-11 | a) UV exposure | 15 | 2.5 | 5 | 37.5 | 20 | 10 | 10 | 100 | ||
UVX-12 | 20 | 7.5 | 5 | 27.5 | 20 | 10 | 10 | 100 | |||
UVX-13 | b) Demolding (trench size; 3 × 3.5 µm) | 20 | 7.5 | 5 | 22.5 | 20 | 5 | 10 | 10 | 100 | |
UVX-14 | 20 | 7.5 | 5 | 10 | 20 | 17.5 | 10 | 10 | 100 | ||
UVX-15 | 20 | 7.5 | 5 | 25 | 22.5 | 10 | 10 | 100 |