*Distance to the top [mm] | Reference parameters | Changed parameters | |||
Flow rate [sccm] | Number of holes | Hole Diameter [mm] | **Chamber volume | ||
| Flow rate [sccm] → 145
Number of holes → 30
Hole diameter [mm] → 18 | 300 - - - | - 54 - - | - - 30 - | - - - 2/3 |
30 | |||||
50 | |||||
80 | |||||
100 |