| Compound | a (Å) | b (Å) | c (Å) | V (Å3) |
| CuSiO3 | 8.7735 (11) | 2.8334 (4) | 4.6357 (6) | 115.24 (5) |
| CuGeO3 | 8.4749 (3) | 2.9431 (1) | 4.8023 (2) | 119.78 (2) |
| CuO2 chain separations in the unit cell | ||||
|
| a/2 (Å) intralayer |
| c (Å) interlayer |
|
| CuSiO3 | 4.3868 (5) |
| 4.6357 (6) |
|
| CuGeO3 | 4.2375 (2) |
| 4.8023 (2) |
|