Mechanical properties | Roughness Ra (nm) | ||||
1 | 2 | 3 | 8 | 42 | |
H | 2.76 | 3.02 | 3.19 | 3.39 | 4.32 |
Er | 196.64 | 201.69 | 221.26 | 229.82 | 198.53 |