| No. | XRD identification results | ||||
| α-YSi2 (Hex.)*1 or β-Y3Si5 (Hex.)*2 | β-YSi2 (Ortho.)*1 | Si | Y2SiO5 and/or Y2Si2O7 | Y2O3 | |
| 1 | vs | ― | m | tr | w |
| 2 | ― | vs | w | tr | ― |
| 3 | vs | ― | w | w | ― |
| 4 | vs | ― | m | ― | ― |
| 5 | vs | ― | m | ― | ― |