name | chemical formula | structure type |
α | Mex(SiAl)12(ON)16 X = 0 ÷ 2 | α-Si3N |
β | Si6-X AlxN8-X X = 0 ÷ 4.2 | β-Si3N4 |
O1 | Si2-XAlXO1+XN2-X X = 0.04 ÷ 0.4 | Si2ON2 |
X | Si2-XAl1-XOxN1-X x = 0.04 ÷ 0.2 | 3Al2O3∙2SiO2 |
H | SiAl3O2N3 SiAl5O2N5 | AlN |
R | SiAl4O2N4 SiAl6O2N6 | AlN |