Source/Drain doping concentration (cm⁻³)

Threshold voltage, V_th (V)

Subthreshold

slope (mV/dec)

On-state current, I_on (μA)

Leakage current, I_off (pA)

DIBL (mV/V)

5 × 10¹⁹

0.33588

76.24

0.66

1103.76

35.78

10²⁰

0.33957

75.64

0.81

1776.31

38.22

5 × 10²⁰

0.35070

75.33

1.05

3145.85

39.23

10²¹

0.35351

75.31

1.13

3518.49

39.26