Channel doping concentration (cm−3) | Threshold voltage, Vth (V) | Subthreshold slope (mV/dec) | On-state current, Ion (μA) | Leakage current, Ioff (nA) | DIBL (mV/V) |
4 × 1018 | 0.27920 | 74.99 | 1006.10 | 27.11 | 53.14 |
5 × 1018 | 0.33957 | 75.64 | 805.71 | 17.76 | 38.22 |
7 × 1018 | 0.43427 | 78.47 | 510.87 | 0.03 | 29.42 |
1 × 1019 | 0.58734 | 82.44 | 242.26 | 0.72 | 30.41 |