| Temperature (˚C) | Growth Rate (nm/cycle) | Carrier Gas (sccm) | Pulse (s) | Purge (s) | |||
| TMA | H2O | TMA | H2O | TMA | H2O | ||
| 250 | 0.1 | 150 | 200 | 0.1 | 0.1 | 4 | 6 |