Sample

Geometric designs

Side length a (μm)

(10, 10, 5 μm)

Space b (μm)

(10, 25, 50 μm)

Depth d (μm)

(10 μm)

Area fraction f

SQU a10-b10-d10

Square 1

10.120

9.986

10.882

0.2533

SQU a10-b25-d10

Square 2

9.933

24.540

12.415

0.0838

SQU a10-b50-d10

Square 3

9.867

49.333

14.694

0.0278

TRI a10-b10-d10

Triangle 4

10.373

10.373

12.656

0.1244

TRI a10-b25-d10

Triangle 5

9.867

25.299

11.147

0.0268

TRI a10-b50-d10

Triangle 6

9.614

50.345

11.868

0.0116

HEX a10-b10-d10

Hexagon 7

5.819

9.590

15.251

0.2107

HEX a10-b25-d10

Hexagon 8

5.819

25.046

12.715

0.0683

HEX a10-b50-d10

Hexagon 9

6.072

49.586

13.244

0.0258