Coating | Process | Structure | Interlayer | Thickness (μm) | Roughness Ra (μm) |
DLC-1 | PVD | a-C:H | CrN | 1.2 | 0.017 |
DLC-2 | PVD | a-C:H:W | CrN | 2.9 | 0.013 |
DLC-3 | PVD | a-C:H | - | 1.3 | 0.015 |
DLC-4 | Plasma CVD + PVD | a-C:H:Si | - | 0.9 | 0.016 |
DLC-5 | Plasma CVD | a-C:H | - | 3.0 | 0.016 |
DLC-6 | Plasma CVD | a-C:H | - | 9.9 | 0.014 |
DLC-7 | Plasma CVD | a-C:H | - | 15.0 | 0.015 |
DLC-8 | Cathode arcion plating | ta-C | - | 1.2 | 0.015 |