|
| SiNx | SiOx |
| SiH4 (sccm) | 210 | 100 |
| NH3/N2O (sccm) | 16 | 60 |
| Temperature (C) | 120 | 120 |
| Thickness (nm) | 400 | 300 |
| n | 1.87 | 1.45 |
| RF-Power (W) | 120 | 100 |
| Pressure (Pa) | 155 | 100 |