Ba-compounds

HA

Substrate temperature [˚C]

720

Pulse repetition rate of ablation laser [Hz]

2

5

Ambient gas

O₂

O₂ + H₂O

Partial pressure of ambient gas [Pa]

100

Deposition time [h]

1

5

Thickness [μm]

1.5

6.5

Used target

Ba metal^a

CellyardÒ^b