| Code | Substrate heating | Substrate polarization | Interval target- Substrate (cm) | Pre-sputtring (min) | Plim (mbar) | Pdép (mbar) | Power FWDP (W) | Ar (sccm) | duration (min) |
| MRT33 | None | Connected to the enclosure | 6.7 | 6 | 5.4.1O−7 | 2.10−2 | 300 | 20 | 20 |
| MRT34 | " | " | " | " | " | " | " | " | " |
| MRT35 | None | Connected to the enclosure | 6.7 | 6 | 2.1O−6 | 1.8.10−2 | 300 | 20 | 30 |
| MRT36 | " | " | " | " | " | " | " | " | " |