Concentration of B (cm₋₃)

Number of B (I + II)

Average diffusion ratio (%)

Average diffusion length (nm)

Phase

I

Phase

II

Total

Phase

III

Phase

IV

Phase

I to II

2E19

2E19

55 (16 + 39)

0.74

(0.41)

0.24

(0.13)

0.50

(0.28)

0.05

(0.02)

1.10

4E19

1.5E19

62 (31 + 31)

0.75

(0.47)

0.39

(0.24)

0.36

(0.23)

0.81

(0.50)

1.12

4E19

2E19

70 (31 + 39)

0.74

(0.52)

0.37

(0.26)

0.37

(0.26)

0.57

(0.40)

1.13

2E19

4E19

95 (16 + 79)

0.73

(0.69)

0.15

(0.14)

0.58

(0.55)

−0.25

(−0.24)

1.14

8E19

2E19

102 (63 + 39)

0.78

(0.79)

0.49

(0.49)

0.29

(0.30)

1.09

(1.11)

1.16

4E19

4E19

110 (31 + 79)

0.81

(0.89)

0.25

(0.27)

0.56

(0.62)

0.08

(0.09)

1.15