Composition of Ge (%) | No. boron | Average diffusion ratio (%) | Average diffusion length (nm) | |||||||
Phase I | Phase II | Total | Phase III | Phase IV | Phase I to II | |||||
15 | 55 (16 + 39) | 0.82 (0.45) | 0.28 (0.16) | 0.54 (0.29) | −0.08 (−0.04) | 1.11 | ||||
26 | 0.78 (0.43) | 0.21 (0.11) | 0.57 (0.31) | 0. (0.) | 1.09 | |||||
30 | 0.72 (0.40) | 0.20 (0.11) | 0.52 (0.29) | 0. (0.) | 1.13 | |||||
15 | 30 | 0.74 (0.41) | 0.24 (0.13) | 0.50 (0.28) | 0.05 (0.02) | 1.10 | ||||