Phase I into

phase II

Average diffusion ratio (%)

Average diffusion length (nm)

1300 K

1325 K

1350 K

1375 K

1400 K

1300 K

1325 K

1350 K

1375 K

1400 K

Si→Si

0.94

3.33

4.63

5.72

7.57

1.06

1.65

2.27

2.77

3.42

SiGe→Si

0.15

0.94

1.17

1.83

2.36

1.02

1.50

2.23

2.68

3.70

Phase I into

phase II

Average diffusion ratio (%)

Average diffusion length (nm)

C_I = 1

C_I = 2

C_I = 3

C_I = 4

C_I = 5

C_I = 1

C_I = 2

C_I = 3

C_I = 4

C_I = 5

Si→Si

0.94

1.63

1.58

1.86

1.91

1.06

1.51

1.70

1.98

2.22

SiGe→Si

0.15

0.19

0.22

0.45

0.63

1.02

0.89

1.77

1.79

1.75

Si→SiGe

1.24

1.76

2.37

2.44

2.62

0.57

0.67

0.81

0.86

1.07

SiGe→SiGe

0.31

0.51

0.68

0.83

0.89

0.43

0.66

0.76

1.04

1.13