| Ta2O3 + TiO2 | Sc2O3 + MgO | HfO2 + Y2O3 | |||
| Incidence angle | Reflectance (%) | Incidence angle | Reflectance (%) | Incidence angle | Reflectance (%) |
| 0 | 98.91 | 0 | 99.40 | 0 | 99.10 |
| 5 | 98.92 | 5 | 99.40 | 5 | 99.11 |
| 10 | 98.92 | 10 | 99.40 | 10 | 99.10 |
| 15 | 98.80 | 15 | 99.30 | 15 | 98.70 |
| 20 | 98.40 | 20 | 98.60 | 20 | 96.50 |