| Ta2O3 + TiO2 | Sc2O3 + MgO | HfO2 + Y2O3 | |||
| Incidence angle | Reflectance (%) | Incidence angle | Reflectance (%) | Incidence angle | Reflectance (%) |
| 0 | 98.91 | 0 | 99.40 | 0 | 99.10 |
| 5 | 98.90 | 5 | 99.39 | 5 | 99.00 |
| 10 | 98.81 | 10 | 99.31 | 10 | 98.95 |
| 15 | 98.54 | 15 | 97.52 | 15 | 98.31 |
| 20 | 97.62 | 20 | 79.23 | 20 | 93.90 |