Duty Factor (%)

T1 & T2

(˚C)

T3

(˚C)

Maximum Temperature (˚C)

Maximum Deformation

(micron)

Frequency Detuning

(kHz)

3

24.8

24.8

25.53

1.67

−0.172

5

24.6

24.6

25.82

2.46

0.066

7

24.4

24.4

26.11

3.26

0.304

10

24.2

24.2

26.64

4.93

0.131